Features:
1. It has both optical and atomic force microscope imaging functions, and can simultaneously scan and image without affecting each other;
2. It has both optical two-dimensional measurement and atomic force microscope three-dimensional measurement functions;
3. The vertical optical path design is adopted, and the gas-liquid dual-purpose probe holder can be used in air or liquid at the same time;
4. Using high-power optical positioning system to achieve precise positioning of probe and sample scanning area;
5. Simple laser calibration, real-time observation and adjustment of laser light class through optical CCD window;
6. The single-axis driving sample automatically approaches the probe vertically, accurately positioning the scanning area, so that the needle tip is perpendicular to the sample scanning;
7. The motor controls the intelligent needle feeding method for the automatic detection of pressurized electric ceramics to protect the probe and samples;
8. Need to be equipped with air-floating anti-vibration platform (optional), strong anti-interference ability, does not affect the operation of the instrument;
9. Integrated scanner hardware non-linear correction user editor, nano-feature performance and measurement accuracy up to 98%.
◆Atomic force working mode: contact, tap, F-Z force curve measurement, RMS-Z curve measurement, friction force/lateral force, amplitude/phase difference, magnetic force and electrostatic force, optional liquid mode
◆Atomic force scanning range: XY direction 20um, Z direction 2um (optional XY direction 50um, Z direction 5um)
◆Sample size: Φ≤90mm, H≤20mm
◆Scanning resolution: XY 0.2nm, Z 0.05mm
◆Sample movement range: 0~20mm
◆Optical objective lens: 5X, 10X, 20X, 50X plan apochromat
◆Optical eyepiece: 10X
◆CCD sensor: 3 million pixels
◆Display: 11.6-inch flat panel display with measurement function
◆Optical focusing method: electric focusing
◆Scanning speed 0.6Hz~4.34Hz, scanning angle 0~360°
◆Scanning control: XY adopts 18-bit D/A, Z adopts 16-bit D/A
◆Data sampling: 14-bit A/D, dual 16-bit A/D
◆Feedback mode: DSP digital feedback
◆Feedback sampling rate: 64.0KHz
◆Communication interface: USB2.0/3.0
◆Operating environment: WindowsXP/7/8/10 operating system